ESD protection for integrated circuit devices

ABSTRACT

An integrated circuit device having insulated gate field effect transistors (IGFETs) having a plurality of horizontally disposed channels that can be vertically aligned above a substrate with each channel being surrounded by a gate structure has been disclosed. The integrated circuit device may include electrostatic discharge (ESD) protection circuit structures. The ESD protection circuit structures may be formed in regions other than the region that the IGFETs are formed as well as in the region that the IGFETs having a plurality of horizontally disposed channels that can be vertically aligned above a substrate with each channel being surrounded by a gate structure are formed. By forming ESD protection circuit structures in regions below the IGFETs, an older process technology may be used and device size may be decreased. Furthermore, planar IGFETs of FinFETs may be formed in other regions to decrease device size and improve costs.

This application claims the benefit of U.S. Provisional PatentApplication Ser. No. 62/991,157, filed Mar. 18, 2020, the contents ofwhich are incorporated by reference herein.

TECHNICAL FIELD

The present invention relates generally to an integrated circuit (IC)device, and more particularly to improving electrostatic discharge (ESD)protection for an IC device.

BACKGROUND OF THE INVENTION

As transistor sizes get smaller, electrostatic discharge (ESD) can bemore problematic due to smaller gate dielectric thicknesses and shortertransistor channels. Furthermore, ESD protection circuit structures maybe incompatible with new technology and/or consume too much of theactive footprint of an integrated circuit device.

In light of the above, it would be desirable to provide ESD protectioncircuit structures having current discharge capabilities beingintegrated with new device technology and having a smaller footprinteffect on an integrated circuit device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a circuit schematic diagram of an integrated circuit deviceincluding a circuit having an ESD protection circuit structure accordingto an embodiment.

FIG. 2 is a circuit schematic diagram of an integrated circuit deviceincluding a circuit having an ESD protection circuit structure accordingto an embodiment.

FIGS. 3A and 3B are circuit schematic diagrams of complementary IGFETshaving a plurality of horizontally disposed channels that can bevertically aligned above a substrate with each channel being surroundedby a gate structure according to an embodiment.

FIG. 4 is a top plan view of an integrated circuit device includingn-type and p-type IGFETS according to an embodiment.

FIG. 5 is a cross sectional view of integrated circuit device accordingto an embodiment.

FIG. 6 is a cross sectional view of integrated circuit device accordingto an embodiment.

FIG. 7 is a schematic diagram of an integrated circuit device accordingto an embodiment.

FIG. 8 is a schematic diagram of an integrated circuit device accordingto an embodiment.

FIG. 9 is a circuit schematic diagram of an ESD protection circuitstructure according to an embodiment.

FIG. 10 is a circuit schematic diagram of an ESD protection circuitstructure according to an embodiment.

FIG. 11 is a circuit schematic diagram of an ESD protection circuitstructure according to an embodiment.

FIG. 12 is a current-voltage diagram of an ESD protection circuitstructure according to an embodiment.

FIG. 13 is a circuit schematic diagram of an integrated circuit deviceaccording to an embodiment.

FIG. 14 is a circuit schematic diagram of an integrated circuit deviceaccording to an embodiment.

FIG. 15 is a circuit schematic diagram of an integrated circuit deviceaccording to an embodiment.

FIG. 16 is a circuit schematic diagram of an integrated circuit deviceaccording to an embodiment.

FIG. 17 is a schematic diagram of an integrated circuit device accordingto an embodiment.

FIG. 18 is a schematic diagram of an integrated circuit device accordingto an embodiment.

FIG. 19 is a cross-sectional schematic diagram of a planar IGFET thatcan be formed in a region according to an embodiment.

FIG. 20A and FIG. 20B are cross-sectional schematic diagrams of a FinFETthat can be formed in a region according to an embodiment.

FIG. 21 is a schematic diagram of an integrated circuit device having anESD protection circuit structure having a plurality of horizontallycurrent carrying regions that can be vertically aligned above asubstrate according to an embodiment.

FIG. 22 is a diagram of an integrated circuit device according to anembodiment.

FIG. 23 is a circuit schematic diagram of an internal circuit and an ESDprotection circuit structure according to an embodiment.

FIG. 24 is a circuit schematic diagram of an integrated circuit deviceincluding a circuit having an ESD protection circuit structure accordingto an embodiment.

DETAILED DESCRIPTION OF THE EMBODIMENTS

According to the embodiments set forth below, an input circuit, outputcircuit, and or input and output circuit including a transistor having aplurality of vertically stacked channels with improved gate control canbe electrically connected to an external terminal and have an ESD(electrostatic discharge) circuit having at least portion of the ESDprotection circuit structure formed in a layer/region below theinput/output circuit. In this way, the footprint of the ESD structure aswell as current leakage may be reduced and reliable ESD may bemaintained.

Referring now to FIG. 1 , an integrated circuit device including acircuit having an ESD protection circuit structure according to anembodiment is set forth in a schematic diagram and given the generalreference character 100.

The circuit formed on integrated circuit device 100 can include pads(110, 120, and 130), internal circuit 140, interface circuit 150, andESD protection circuit structures (160 and 170). Integrated circuitdevice 100 may be a semiconductor device.

Pad 110 may receive an externally provided supply potential (for exampleVDD). Pad 120 may receive an externally provided power supply potential(for example, VSS i.e. ground potential).

Pad 110 may be electrically connected to provide an externally providedsupply potential (for example VDD) to internal circuit 140, interfacecircuit 150, and ESD protection circuit structures (160 and 170). Pad120 may be electrically connected to provide an externally providedpower supply potential (for example VSS) to internal circuit 140,interface circuit 150, and ESD structures (160 and 170). Pad 130 mayprovide and/or receive an external signal (for example, a data orcontrol signal) to or from interface circuit 150 through ESD protectioncircuit structure 170. Interface circuit may receive or generate aninternal signal at terminal 152. Interface circuit 150 may be a buffercircuit that buffers the external and internal signals generated orreceived.

Internal circuit 140 may receive at least one signal at an inputterminal 142 and may provide at least one signal at an output terminal144. In another example, internal circuit 140 may be an internal voltageregulating circuit that provides an internal power supply potential. Theinput terminal 142 and the output terminal 144 of internal circuit 140are not electrically connected to any pad that can receive or provide asignal external to the integrated circuit device 100.

In one embodiment, internal circuit 140 may include insulated gate fieldeffect transistors (IGFETs) having a plurality of horizontally disposedchannels that can be vertically aligned above a substrate with eachchannel being surrounded by a gate structure. Interface circuit 150 mayinclude insulated gate field effect transistors (IGFETs) having aplurality of horizontally disposed channels that can be verticallyaligned above a substrate with each channel being surrounded by a gatestructure. Both internal circuit 140 and interface circuit 150 mayinclude p-type and n-type IGFETs. In one embodiment, ESD protectioncircuit structures (160 and 170) may include electrical components (suchas diodes) formed with a plurality of horizontally disposed cathodes andanodes that can be vertically aligned above a substrate. In oneembodiment, ESD protection circuit structures (160 and 170) may includeelectrical components (such as diodes, transistors, silicon controlledrectifiers (SCRs) and/or resistors) formed in the substrate. In oneembodiment interface circuit 150 may include electrical components (suchas IGFETs) formed in the substrate.

When ESD protection circuit structures (160 and 170) are formed in asemiconductor substrate of integrated circuit device 100, a processhaving larger critical dimensions (i.e. an older process and lessexpensive) may be used. The semiconductor substrate may then be sent toa state of the art fabrication facility to form the circuit includinginsulated gate field effect transistors (IGFETs) having a plurality ofhorizontally disposed channels that can be vertically aligned above asubstrate with each channel being surrounded by a gate structure as willbe discussed further in the specification.

Referring now to FIG. 2 , an integrated circuit device including acircuit having an ESD protection circuit structure according to anembodiment is set forth in a circuit schematic diagram and given thegeneral reference character 200. Integrated circuit device 200 mayinclude a first circuit section 202 and a second circuit section 204.First circuit section 202 may include circuits that only have externalconnections to a power supply potential and/or a ground (VSS) potential.Second circuit section 204 may include circuits that have externalconnections to a power supply potential, a ground potential, and/or apad coupled to provide or receive an external signal, such as a datasignal, control signal or a clock signal, as just a few examples. Firstcircuit section 202 may include an internal circuit 212 and an ESDprotection circuit structure 214. Internal circuit 212 and ESD structure214 may each be electrically connected to pad (210 and 216). Internalcircuit 212 may receive an input signal at an input terminal 218 and mayprovide an output signal at an output terminal 220. Pad 210 may receivean external power supply potential, such as VDD and pad 216 may receivean external reference potential such as VSS. In other embodiments,internal circuit 212 may be an internal power supply generator and mayreceive an external power supply potential at pad 210 and may provide aninternal power supply potential to be used by internal circuits. Theinput terminal 218 and the output terminal 220 of internal circuit 212are not electrically connected to any pad that can receive or provide asignal external to the integrated circuit device 200.

Second circuit section 204 may include pads (250, 264, and 266), an ESDprotection circuit structure 252, an interface circuit 254, and ESDprotection circuit structure 256. Interface circuit 254 may provide orreceive an internal signal at terminal 262 and may provide and/orreceive an external signal at pad 266 through ESD protection circuitstructure 256. Interface circuit 254 may be electrically connected topads (250 and 264). Pads (250 and 264) may respectively receive anexternal power supply potential (such as VDD) and a reference potential(such as VSS). ESD structure 252 may be electrically connected betweenpads (250 and 264). ESD structure 256 may be electrically connected topads (250, 264, and 266).

In one embodiment, internal circuit 212 may include insulated gate fieldeffect transistors (IGFETs) having a plurality of horizontally disposedchannels that can be vertically aligned above a substrate with eachchannel being surrounded by a gate structure. Interface circuit 254 mayinclude insulated gate field effect transistors (IGFETs) having aplurality of horizontally disposed channels that can be verticallyaligned above a substrate with each channel being surrounded by a gatestructure. Both internal circuit 212 and interface circuit 254 mayinclude p-type and n-type IGFETs. In one embodiment, ESD protectioncircuit structures (214, 252, and 256) may include electrical components(such as diodes, transistors, and/or resistors) formed with a pluralityof horizontally disposed cathodes and anodes that can be verticallyaligned above a substrate. In one embodiment, ESD protection circuitstructures (214, 252, and 256) may include electrical components (suchas diodes, transistors, SCRs and/or resistors) formed in the substrate.In one embodiment interface circuit 254 may include electricalcomponents (such as IGFETs) formed in the substrate.

When ESD protection circuit structures (214, 252, and 256) are formed ina semiconductor substrate of integrated circuit device 200, a processhaving larger critical dimensions (i.e. an older and cheaper process)may be used. The semiconductor substrate may then be sent to a state ofthe art fabrication facility to form the circuit including insulatedgate field effect transistors (IGFETs) having a plurality ofhorizontally disposed channels that can be vertically aligned above asubstrate with each channel being surrounded by a gate structure as willbe discussed further in the instant specification.

Power supply potentials externally provided to pads (210 and 250) may bedifferent power supply potentials, such as a first potential (VDD1) forinternal circuit 212 and a second potential (VDD2) for interface circuit254.

The IGFETs having a plurality of horizontally disposed channels that canbe vertically aligned above a substrate with each channel beingsurrounded by a gate structure will now be discussed.

Referring now to FIGS. 3A and 3B, circuit schematic diagrams ofcomplementary IGFETs having a plurality of horizontally disposedchannels that can be vertically aligned above a substrate with eachchannel being surrounded by a gate structure according to an embodimentare set forth. FIG. 3A is a N-channel (N-type) IGFET 300A and FIG. 3B isa P-channel (P-type) IGFET 300B.

N-channel IGFET 300A includes a control gate terminal 310A, a firstsource/drain terminal 320A, and a second source/drain terminal 330A.Control gate terminal 310A may be electrically connected to control gate312A. Control gate 312A may be drawn as a plurality of control gates oneach side of a plurality of channel region 314A. In reality, controlgate 312A may surround a plurality of horizontally disposed channelregions 314A that can be vertically aligned above a substrate.

P-channel IGFET 300B includes a control gate terminal 310B, a firstsource/drain terminal 320B, and a second source/drain terminal 330B.Control gate terminal 310B may be electrically connected to control gate312B. Control gate 312B may be drawn as a plurality of control gates oneach side of a plurality of channel region 314B. In reality, controlgate 312B may surround a plurality of horizontally disposed channelregions 314B that can be vertically aligned above a substrate.

Referring now to FIG. 4 , a top plan view of an integrated circuitdevice including n-type and p-type IGFETS according to an embodiment isset forth and given the general reference character 400.

Integrated circuit device 400 may include an N-type IGFET 410A and aP-type IGFET 410B.

N-type IGFET 410A and P-type IGFET 410B may each include a control gatethat may surround a plurality of horizontally disposed channel regionsthat can be vertically aligned above a substrate.

N-type IGFET 410A may include drain/source contacts 418A, a gate contact416A, a gate structure 414A, and vertically aligned and horizontallydisposed channel region structures 412A.

P-type IGFET 410B may include drain/source contacts 418B, a gate contact416B, a gate structure 414B, and vertically aligned and horizontallydisposed channel region structures 412B.

Referring now to FIG. 5 , a cross sectional view of integrated circuitdevice 400 is set forth. The cross-sectional view is along the lineII-II of FIG. 4 .

Integrated circuit device 400 may include a substrate 402, an insulatorlayer 422 a N-type IGFET 410A, and a P-type IGFET 410B.

N-type IGFET 410A may include a gate contact 416A, a gate structure414A, and vertically aligned and horizontally disposed channel regions412A, and gate insulating layer 420A. Gate insulating layer 420A maysurround each vertically aligned and horizontally disposed channelregions 412A.

P-type IGFET 410B may include a gate contact 416B, a gate structure414B, and vertically aligned and horizontally disposed channel regions412B, and gate insulating layer 420B. Gate insulating layer 420B maysurround each vertically aligned and horizontally disposed channelregions 412B.

As will be discussed later, IGFETS including vertically aligned andhorizontally disposed channel region structures may be used in internalcircuits 140 of FIG. 1 or internal circuits 212 of FIG. 2 and/orinterface circuit 150 of FIG. 1 and/or interface circuit 254 of FIG. 2 ,for example and ESD protection circuit structures (140, 160, 170, 214,252, and/or 256) may include diodes, transistors, SCRs and/or resistorsformed in substrate 402.

Referring now to FIG. 6 , a cross sectional view of integrated device400 is set forth. The cross-sectional view is along the line I-I of FIG.4 . As shown in FIG. 4 , there are two lines I-I as the N-type IGFET410A and P-type IGFET 410B may have similar structures except thematerials and/or doping of materials may differ and elements aredesignated with the suffix “A/B” to illustrate such. Semiconductordevice 400 may include a substrate 402, an insulator layer 422 andN-type and P-type IGFETs (410A/B). IGFET 410A/B may include a gatecontact 416A/B, a gate structure 414A/B, vertically aligned andhorizontally disposed channel regions 412A/B, gate insulating layer420A/B, and drain/source contacts 418A/B. Gate structure 416A/B and gateinsulating layer 420A/B may surround each vertically aligned andhorizontally disposed channel regions 412A/B.

IGFETs (410A and 410B) may be formed by forming a layered crystal of twomaterials over dielectric region 422. For example, layers of silicon andsilicon germanium may be formed. An etch and deposit step may then beused to form the source/drain regions (418A and 418B). The silicon layermay form the channel regions (412A and 412B). After a vertical etch, thesilicon germanium layers may be etched by using a chemical that canselectively etch silicon germanium with the source/drain regions (418Aand 418B) used as support structures. Next, the gate dielectric layers(420A and 420B) may be formed using atomic layer deposition, for exampleof hafnium-dioxide. Then gate structure (416A and 416B) may be formedusing atomic layer deposition of a metal layer, for example, tungsten.The n-type IGFETs 410A may have source/drain regions 418A doped withn-type carriers, such as phosphorous and/or arsenic, for example. Thep-type IGFETs 410B may have source/drain regions 418B doped with p-typecarriers, such as boron, for example.

As will be discussed later, IGFETS including vertically aligned andhorizontally disposed channel region structures may be used in internalcircuits 140 of FIG. 1 or internal circuits 212 of FIG. 2 and/orinterface circuits 150 of FIG. 1 and/or interface circuit 254 of FIG. 2, for example and ESD structures (140, 160, 170, 214, 252, and/or 256)may include diodes, transistors, and/or resistors formed in substrate402.

Referring now to FIG. 7 , a schematic diagram of an integrated circuitdevice according to an embodiment is set forth and given the generalreference character 700.

Integrated circuit device 700 may include similar constituents asintegrated circuit device 100 including IGFETs of integrated circuitdevice 400, such constituents may be given the same reference character.Integrated device 700 can include ESD protection circuit structures 160and 170 formed in a substrate 402, an internal circuit 140, and aninterface circuit 150.

Integrated circuit device 700 may include different regions. A region710 may include ESD structures (160 and 170) formed in a semiconductorsubstrate 402. Another region 720 may include an insulator region 422which may contain wirings 740. Wirings 740 may provide an interconnectbetween ESD structures (160 and 170) and interface circuit 150, internalcircuit 140, and/or pads (110, 120, and 130). Wirings 740 may be in theform of vertical vias that are formed through insulator layer 422 and/orregion 720. Another region 730 may include internal circuit 140 andinterface circuit 150, as well as wirings 750, and pads (110, 120, and130).

Pad 110 may receive an externally provided supply potential (for exampleVDD). Pad 120 may receive an externally provided power supply potential(for example VSS), and pad 130 may provide and/or receive an externalsignal (for example, a data or control signal).

ESD protection circuit structures (160 and 170) in region 710 may beformed using planar IGFETs, n-type and/or p-type diffusion regions, andsilicon control rectifiers (SCR), for example. Region 720 may includepassive elements, such as polysilicon and/or metal resistors,incorporated in ESD protection circuit structures (160 and 170).

Internal circuit 140 and interface circuit 150 in region 730 may includep-type and n-type IGFETs having a plurality of horizontally disposedchannels that can be vertically aligned above substrate 402. Region 730may generally have circuitry comprising p-type and n-type IGFETs havinga plurality of horizontally disposed channels that can be verticallyaligned above substrate 402. Region 710 may include planar IGFETsfabricated using older technologies with more relaxed criticaldimensions. In this way, reliable ESD protection circuit structures canbe made more cheaply. Another advantage is that the region 730exclusively has the normal operating circuits (i.e. exclusive of ESDprotection circuit structures which only operate when there is an ESDevent). For example, if integrated circuit device 700 is amicroprocessor, the central processing unit (CPU), bus, and memory wouldall be located in region 730 and manufactured with a cutting-edge stateof the art process having smaller critical dimensions. By forming ESDstructure (160 and 170) below the functional circuits, chip size can bereduced.

Referring now to FIG. 8 , a schematic diagram of an integrated circuitdevice according to an embodiment is set forth and given the generalreference character 800.

Integrated circuit device 800 may include similar constituents assemiconductor device 200 including IGFETs of integrated circuit device400, such constituents may be given the same reference character.Integrated circuit device 800 can include ESD protection circuitstructures (214, 252, and 256) formed in a substrate 402, an internalcircuit 212, and an interface circuit 254.

Integrated circuit device 800 may include different regions. A region810 may include ESD protection circuit structures (214, 252, and 256)formed in a semiconductor substrate 402. Another region 820 may includean insulator region 422 which may contain wirings 840. Wirings 840 mayprovide an interconnect between ESD protection circuit structures (214,252, and 256) and interface circuit 254, internal circuit 212, and/orpads (210, 216, 250, 264, and 266). Wirings 840 may be in the form ofvertical vias that are formed through insulator layer 422 and/or region820. Another region 830 may include internal circuit 212 and interfacecircuit 254, as well as wirings 850, and pads (210, 216, 250, 264, and266).

Internal circuit 212 and ESD protection circuit structure 214 may eachbe electrically connected to pad (210 and 216). Internal circuit 212 mayreceive an input signal at an input terminal 218 and may provide anoutput signal at an output terminal 220. Pad 210 may receive an externalpower supply potential, such as VDD and pad 216 may receive an externalreference potential such as VSS. In other embodiments, internal circuit212 may be an internal power supply generator and may receive anexternal power supply potential at pad 216 and may provide an internalpower supply potential to be used by internal circuits.

Pad 250 may receive an externally provided supply potential (for exampleVDD). Pad 264 may receive an externally provided power supply potential(for example VSS), and pad 266 may provide and/or receive an externalsignal (for example, a data or control signal).

ESD protection circuit structures (214, 252, and 256) in region 810 maybe formed using planar IGFETs, n-type and/or p-type diffusion regions,and silicon control rectifiers (SCR), for example. Region 820 mayinclude passive elements, such as polysilicon and/or metal resistors,incorporated in ESD structures (214, 252, and 256).

Internal circuit 212 and interface circuit 254 in region 830 may includep-type and n-type IGFETs having a plurality of horizontally disposedchannels that can be vertically aligned above substrate 402. Region 830may generally have circuitry comprising p-type and n-type IGFETs havinga plurality of horizontally disposed channels that can be verticallyaligned above substrate 402. Region 810 may include planar IGFETs orFinFETs fabricated using older technologies with more relaxed criticaldimensions. In this way, reliable ESD protection circuit structures canbe made more cheaply. Another advantage is that the region 830exclusively has the normal operating circuits (i.e. exclusive of ESDstructures which only operate when there is an ESD event). For example,if semiconductor device 800 is a microprocessor, the central processingunit (CPU), bus, and memory would all be located in region 830 andmanufactured with a cutting edge state of the art process having smallercritical dimensions. By forming ESD protection circuit structures (214,252, and 256) below the functional circuits, chip size can be reduced.

FIGS. 9 to 11 illustrate various ESD protection circuit structures thatmay be formed in regions (710 and 810) of FIGS. 7 and 8 .

Referring now to FIG. 9 , a circuit schematic diagram of an ESDprotection circuit structure according to an embodiment is set forth andgiven the general reference character 900. ESD structure 900 may be asilicon controlled rectifier (SCR).

ESD structure 900 may include bipolar transistors (Q1 and Q2) andresistors (R910 and R920). Bipolar transistor Q1 may have an emitterterminal connected to a terminal 910, a base terminal commonly connectedto a first terminal of resistor R920 and a collector terminal of bipolartransistor Q2, and a collector terminal commonly connected to a baseterminal of bipolar transistor Q2 and a first terminal of resistor R910.Bipolar transistor Q2 may have an emitter terminal connected to aterminal 920. Resistor R910 may have a second terminal connected toterminal 920. Resistor R920 may have a second terminal connected toterminal 910.

ESD structure 900 may be used as ESD protection circuit structures (160,170, 214, 252, and/or 256). When used as ESD protection circuitstructure (140, 214, or 252) terminal 910 may be electrically connectedto pads (110, 210, or 250) respectively, and terminal 920 may beelectrically connected to pads (120, 216, or 264) respectively. When ESDprotection circuit structure 900 is used as ESD protection circuitstructure (170 or 256), terminal 910 may be connected to pads (130 or266) respectively and terminal 920 may be electrically connected to pads(120 or 264) respectively.

Referring now to FIG. 10 , a circuit schematic diagram of an ESDprotection circuit structure according to an embodiment is set forth andgiven the general reference character 1000.

ESD protection circuit structure 1000 can include diodes (D1002 andD1004). Diode D1002 may have a cathode terminal connected to terminal1020 and an anode terminal connected to terminal 1010. Diode D1004 mayhave a cathode terminal connected to terminal 1010 and an anode terminalconnected to terminal 1030.

ESD protection circuit structure 1000 may be used as ESD protectioncircuit structures (170 and 256). When used as ESD protection circuitstructures (170 or 256), terminal 1020 may be electrically connected topads (110 or 250), respectively, terminal 1010 may be electricallyconnected to pads (130 or 266), respectively, and terminal 1030 may beelectrically connected to pads (120 or 264), respectively.

Referring now to FIG. 11 , a circuit schematic diagram of an ESDprotection circuit structure according to an embodiment is set forth andgiven the general reference character 1100.

ESD structure 1100 can include IGFETs (P1102 and N1102). IGFET P1102 mayhave a source terminal and gate terminal commonly electrically connectedto terminal 1120 and drain terminal electrically connected to terminal1110. IGFET N1102 may have a source terminal and gate terminal commonlyelectrically connected to terminal 1130 and drain terminal electricallyconnected to terminal 1110. IGFET P1102 may be a p-type IGFET and IGFETN1102 may be a n-type IGFET.

ESD structure 1100 may be used as ESD protection circuit structures (170and 256). When used as ESD protection circuit structures (170 or 256),terminal 1120 may be electrically connected to pads (110 or 250),respectively, terminal 1110 may be electrically connected to pads (130or 266), respectively, and terminal 1130 may be electrically connectedto pads (120 or 264), respectively.

Referring now to FIG. 12 , a current-voltage diagram of an ESDprotection circuit structure is set forth.

FIG. 12 is a current-voltage diagram of a typical ESD protection circuitstructure. For example, FIG. 12 may be a current-voltage (I-V) diagramof SCR 900 of FIG. 9 .

For example, the current voltage diagram of FIG. 12 shows the SCR 900 ina forward blocking region 1202 in which there is minimal leakagecurrent, which occurs when there is no ESD event. Once an ESD eventoccurs and the voltage spikes above a trigger voltage Vtrigger shown atpoint 1204 in the I-V diagram of FIG. 12 , the SCR 900 snaps backthrough snap back region 1206 toward a minimum holding voltage Vholdingat point 1208. Then in the holding region 1210, the SCR functions as anear ideal switch, the slope in holding region 1210 represents the onresistance of the SCR 1200. This slope is proportional to the size ofthe SCR 1200, thus a larger SCR 1200 dissipates more current at a lowerholding voltage in the holding region. In designing the ESD protectioncircuit structures it is important to place the trigger voltage Vtriggerat a voltage that will be low enough that the IGFETs formed withvertically aligned and horizontally disposed channel regions in regions(730 and 830) will not breakdown during an ESD event.

Referring now to FIG. 13 , a circuit schematic diagram of an integratedcircuit device according to an embodiment is set forth and given thegeneral reference character 1300.

Integrated circuit device 1300 can include an ESD protection circuitstructure 1310 and an input buffer circuit 1320. ESD protection circuitstructure 1310 can be electrically connected to receive an input signalat a pad 1304. The input signal may pass through the ESD protectioncircuit structure 1310 to terminal 1314.

Input buffer circuit 1320 may receive the input signal from terminal1314 and may provide an output signal at terminal 1308 (terminal 1308may be an output terminal). Input buffer circuit 1320 may receive anenable signal EN at terminal 1322 and a reference potential Vref atterminal 1324.

ESD circuit structure 1310 can include an ESD protection circuitstructure 1312 and a resistor R1300. ESD protection circuit structure1312 may be electrically connected to pads (1302, 1304, and 1306). Pad1302 may receive an externally provided power supply potential, such asVDD. Pad 1306 receive an externally provided power supply potential,such as VSS. Pad 1304 may receive an input signal, such as an address,data, and/or control signal, as just a few examples. ESD protectioncircuit structure 1312 may be electrically connected to a first terminalof resistor R1300. Resistor R1300 may be electrically connected toterminal 1314.

ESD structure 1312 may be an ESD protection circuit structure (900,1000, or 1100), as just a few examples. In the case of ESD structure(900, 1000, or 1100), pad 1304 may be electrically connected to terminal(910, 1010, or 1110), respectively.

Input buffer circuit 1320 may include IGFETs (P1322, P1324, N1322,N1324, and N1326). IGFET P1322 may have a source terminal electricallyconnected to pad 1302 and commonly coupled to a source terminal of IGFETP1324. IGFET P1322 may have a gate terminal and a drain terminalcommonly connected to a gate terminal of IGFET P1324 and a drainterminal of IGFET N1322. IGFET P1324 may have a drain terminal connectedto terminal 1308. IGFET N1322 may have a gate terminal coupled toreceive a signal at terminal 1314 through ESD circuit structure 1310.IGFET N1322 may have a source terminal commonly connected to a sourceterminal of IGFET N1324 and a drain terminal of IGFET N1326. IGFET N1324may have a drain terminal connected to terminal 1308 and a gate terminalconnected to receive a reference potential Vref at terminal 1324. IGFETN1326 may have a gate terminal connected to receive an enable signal ENat terminal 1322 and a source terminal connected to pad 1306. Inputbuffer circuit 1320 may operate as a differential input buffer that isenabled when enable signal EN is at a logic high level and disabled whenenable signal EN is at a logic low level.

IGFETs (P1322, P1324, N1322, N1324, and N1326) may each include acontrol gate that may surround a plurality of horizontally disposedchannel regions that can be vertically aligned above a substrate as setforth in FIGS. 3A, 3B, 4, 5, and 6 and may be formed in region (702 or802) as set forth in FIGS. 7 and 8 , respectively. ESD structure 1312may be formed in regions 402 in FIGS. 7 and 8 , for example. ResistorR1300 may be formed in region (402 and/or 422) in FIGS. 7 and 8 , forexample. Resistor R1300 may even be formed in region (702 or 802) as setforth in FIGS. 7 and 8 , respectively. Resistor R1300 may be formed, forexample, as a diffusion layer in region 402, a metal layer in region422, and/or a metal layer in region (702 or 802) as set forth in FIGS. 7and 8 , respectively.

Reference potential Vref may provide a threshold voltage for determiningthe logic level of an input signal received at pad 1304. For example, ifthe potential of the input signal received at pad 1304 is greater thanreference potential Vref, input buffer circuit 1320 may provide a logichigh output at output terminal 1308. However, if the potential of theinput signal received at pad 1304 is less than reference potential Vref,input buffer circuit 1320 may provide a logic low output at outputterminal 1308.

Referring now to FIG. 14 , a circuit schematic diagram of an integratedcircuit device according to an embodiment is set forth and given thegeneral reference character 1400.

Integrated circuit device 1400 can include an ESD protection circuitstructure 1410 and an output buffer circuit 1420. ESD circuit structure1410 can be electrically connected to a pad 1404 where an output signalmay be provided externally to the integrated circuit device 1400. Theoutput signal may pass from output buffer 1420 through the ESD circuitstructure 1410 to pad 1404.

Output buffer circuit 1420 may receive an input signal from terminal1408 and may provide an output signal at terminal 1414

ESD circuit structure 1420 can include an ESD structure 1412 and aresistor R1400. ESD structure 1412 may be electrically connected to pads(1402, 1404, and 1406). Pad 1402 may receive an externally providedpower supply potential, such as VDD. Pad 1406 receive an externallyprovided power supply potential, such as VSS. Pad 1404 may receive asignal to be provided externally from integrated circuit device 1400.ESD protection circuit structure 1412 may be electrically connected to afirst terminal of resistor R1400. A second terminal of resistor R1400may be electrically connected to terminal 1414.

ESD protection circuit structure 1412 may be an ESD protection circuitstructure (900, 1000, or 1100), as just a few examples. In the case ofESD protection circuit structure (900, 1000, or 1100), pad 1404 may beelectrically connected to terminal (910, 1010, or 1110), respectively.

Output buffer circuit 1420 may include IGFETs (P1422 and N1422). IGFETP1322 may have a source terminal electrically connected to pad 1402.IGFET P1422 may have a gate terminal and input terminal 1408 and a gateof IGFET N1422. IGFET P1422 may have a drain commonly connected to adrain of IGFET N1422 and a second terminal of resistor R1400 at node1414. IGFET N1422 may have a source terminal electrically connected topad 1406. Output buffer circuit 1420 may operate as an inverter logiccircuit that provides current drive to a signal, such as a data signalor the like that is to be driven to components external to integratedcircuit device 1400.

IGFETs (P1422 and N1422) may each include a control gate that maysurround a plurality of horizontally disposed channel regions that canbe vertically aligned above a substrate as set forth in FIGS. 3A, 3B, 4,5, and 6 and may be formed in region (702 or 802) as set forth in FIGS.7 and 8 , respectively. ESD protection circuit structure 1412 may beformed in regions 402 in FIGS. 7 and 8 , for example. Resistor R1400 maybe formed in region (402 and/or 422) in FIGS. 7 and 8 , for example.Resistor R1400 may even be formed in region (702 or 802) as set forth inFIGS. 7 and 8 , respectively. Resistor R1300 may be formed, for example,as a diffusion layer in region 402, a metal layer in region 422, and/ora metal layer in region (702 or 802) as set forth in FIGS. 7 and 8 ,respectively.

Referring now to FIG. 15 , a circuit schematic diagram of an integratedcircuit device according to an embodiment is set forth and given thegeneral reference character 1500. Integrated circuit device 1500 mayinclude like constituents as integrated circuit device 1400 and suchconstituents may be designated by the same reference character and forbrevity will not be discussed. Integrated circuit device 1500 may differfrom integrated circuit device 1400 of FIG. 14 , in that an outputbuffer 1520 may have IGFETs (P1522 and N1522) that are formed insubstrate 402 and may be planar IGFETs of FinFETs, while other circuits,such as an internal circuit (140 or 212) of FIGS. 1 and 2 ,respectively, may be formed from IGFETs that include a control gate thatmay surround a plurality of horizontally disposed channel regions thatcan be vertically aligned above a substrate as set forth in FIGS. 3A,3B, 4, 5, and 6 and may be formed in region (702 or 802) as set forth inFIGS. 7 and 8 , respectively.

Integrated circuit device 1300 and integrated circuit devices (1400 and1500) may be incorporated into integrated circuit devices (100 and 200).Integrated circuit device 1300 may have a separate pad electricallyconnected to the input terminal 1304 than a pad electrically connectedto the output terminal 1404 of integrated circuit devices (1400 and1500). Input buffer circuit 1320 and ESD structure 1310 of integratedcircuit device 1300 may be used as interface circuit 150 and ESD circuitstructure 170 of integrated circuit device 100 of FIG. 1 . Input buffercircuit 1320 and ESD structure 1310 of integrated circuit device 1300may be used as interface circuit 254 and ESD circuit structure 256 ofintegrated circuit device 200 of FIG. 2 . Output buffer circuit 1420 andESD structure 1410 of integrated circuit device 1400 may be used asinterface circuit 150 and ESD circuit structure 170 of integratedcircuit device 100 of FIG. 1 . Output buffer circuit 1420 and ESDstructure 1410 of integrated circuit device 1400 may be used asinterface circuit 254 and ESD circuit structure 256 of integratedcircuit device 200 of FIG. 2 . Output buffer circuit 1520 and ESDstructure 1510 of integrated circuit device 1500 may be used asinterface circuit 150 and ESD circuit structure 170 of integratedcircuit device 100 of FIG. 1 . Output buffer circuit 1520 and ESDstructure 1510 of integrated circuit device 1500 may be used asinterface circuit 254 and ESD circuit structure 256 of integratedcircuit device 200 of FIG. 2 .

Referring now to FIG. 16 , a schematic diagram of an integrated circuitdevice according to an embodiment is set forth and given the generalreference character 1600.

Integrated circuit device 1600 may be like integrated circuit device 700of FIG. 7 , except integrated circuit device 1600 may include a resistor1610 formed in region 730 along with the circuitry comprising p-type andn-type IGFETs having a plurality of horizontally disposed channels thatcan be vertically aligned above semiconductor substrate 402.

Resistor 1610 may have one terminal electrically connected to pad 130 aswell as ESD protection circuit structure 170 and another terminalelectrically connected to interface circuit 150. Resistor 1610 maycorrespond to resistors R1400 in integrated circuit devices (1400 and1500) as set forth in FIGS. 14 and 15 . Resistor 1610 may comprise ametal, such as copper, tungsten, aluminum, and/or titanium or evenpolysilicon, as just a few examples.

Referring now to FIG. 17 , a schematic diagram of an integrated circuitdevice according to an embodiment is set forth and given the generalreference character 1700.

Integrated circuit device 1700 may be like integrated circuit device 700of FIG. 7 , except integrated circuit device 1700 may include a resistor1710 formed in region 720 along with wirings 740.

Resistor 1710 may have one terminal electrically connected to pad 130 aswell as ESD protection circuit structure 170 and another terminalelectrically connected to interface circuit 150. Resistor 1710 maycorrespond to resistors R1400 in integrated circuit devices (1400 and1500) as set forth in FIGS. 14 and 15 . Resistor 1710 may comprise ametal, such as copper, tungsten, aluminum, and/or titanium or evenpolysilicon, as just a few examples.

Referring now to FIG. 18 , a schematic diagram of an integrated circuitdevice according to an embodiment is set forth and given the generalreference character 1800.

Integrated circuit device 1800 may be like integrated circuit device 700of FIG. 7 , except integrated circuit device 1800 may include a resistor1810 formed in region 710 along with ESD structures (160 and 170) andplanar IGFETs fabricated using older technologies with more relaxedcritical dimensions.

Resistor 1810 may have one terminal electrically connected to pad 130 aswell as ESD protection circuit structure 170 and another terminalelectrically connected to interface circuit 150. Resistor 1810 maycorrespond to resistors R1400 in integrated circuit devices (1400 and1500) as set forth in FIGS. 14 and 15 . Resistor 1810 may comprise ametal, such as copper, tungsten, aluminum, and/or titanium, orpolysilicon or a diffusion layer, as just a few examples.

Resistors (R1300, R1400, 1610, 1710, and/or 1810) need sufficientresistance to provide a voltage drop between the pad 1404 and theinterface circuit 150. Resistors (R1300 and R1400) may be about 11 kΩ to10 kΩ.

The process minimum feature size of region 730 may be the control gatelength of p-type and n-type IGFETs having a plurality of horizontallydisposed channels that can be vertically aligned above semiconductorsubstrate 402. Gate length is illustrated with reference to FIG. 6 , inwhich “L” is the gate length of IGFET 410A/B. In the embodiments, theminimum gate length may be about 5 nm or less.

The process minimum feature size of region 402 may be substantiallygreater. For example, a gate length of planar IGFETs formed in region402 may be 10 nm or greater. An example of a planar IGFET is illustratedin FIG. 19 .

Referring now to FIG. 19 , a cross-sectional schematic diagram of aplanar IGFET that can be formed in region 402 is set forth and given thegeneral reference character 1900. A planar IGFET formed in region 402can include a semiconductor substrate 1902 in which source/drain regions1918 may be formed, a gate insulating layer 1920, a control gate 1914and an insulating layer 1930. Region 402 can include p-type IGFETs andn-type IGFETs. For example, an n-type IGFET may be formed by implantingn-type impurities into source/drain regions 1918 of a p-typesemiconductor substrate 1902. A p-type IGFET may be formed by providinga n-type well in semiconductor substrate 1902 and implanting p-typeimpurities into source/drain regions 1918. Planar IGFET may have a gatelength L1 of about 10 nm or greater. In this way, cost may be reduced ascompared to the fabrication to IGFETs having a plurality of horizontallydisposed channels that can be vertically aligned above a substrate witheach channel being surrounded by a gate structure as in region 702.

The IGFET formed in region 402 can be used as IGFETs (P1522 and N1522)that are formed in substrate 402 as illustrated in FIG. 15 , while othercircuits, such as an internal circuit (140 or 212) of FIGS. 1 and 2 ,respectively, may be formed from IGFETs that include a control gate thatmay surround a plurality of horizontally disposed channel regions thatcan be vertically aligned above a substrate as set forth in FIGS. 3A,3B, 4, 5, and 6 and may be formed in region (702 or 802) as set forth inFIGS. 7 and 8 , respectively.

Referring now to FIGS. 20A and 20B, a cross-sectional schematic diagramsof a Fin field effect transistor (FinFET) type IGFET (i.e. FinFET) thatcan be formed in region 402 is set forth and given the general referencecharacter 2000.

FIG. 20A may be a cross-sectional schematic diagram of a FinFET alongthe width of a channel region 2016 and FIG. 20B may be a cross-sectionalschematic diagram of a FinFET along the length of a channel region 2016and between source/drain regions 2018.

A FinFET formed in region 402 can include a semiconductor substrate 2002in which source/drain regions 2018 may be formed, a gate insulatinglayer 2020, a control gate 2014 and an insulating layer 2030. Region 402can include p-type FinFETs and n-type FinFETs. For example, an n-typeFinFET may be formed by implanting n-type impurities into source/drainregions 2018 of a p-type semiconductor substrate 2002. A p-type FinFETmay be formed by providing a n-type well in semiconductor substrate 2002and implanting p-type impurities into source/drain regions 2018. FinFETmay have a gate length L2 of about 7 nm or greater. In this way, costmay be reduced as compared to the fabrication to IGFETs having aplurality of horizontally disposed channels that can be verticallyaligned above a substrate with each channel being surrounded by a gatestructure as in region 702.

The FinFET formed in region 402 can be used as IGFETs (P1522 and N1522)that are formed in substrate 402 as illustrated in FIG. 15 , while othercircuits, such as an internal circuit (140 or 212) of FIGS. 1 and 2 ,respectively, may be formed from IGFETs that include a control gate thatmay surround a plurality of horizontally disposed channel regions thatcan be vertically aligned above a substrate as set forth in FIGS. 3A,3B, 4, 5, and 6 and may be formed in region (702 or 802) as set forth inFIGS. 7 and 8 , respectively.

Referring now to FIG. 21 , a schematic diagram of an integrated circuitdevice having an ESD protection circuit structure having a plurality ofhorizontally current carrying regions that can be vertically alignedabove a substrate is set forth and given the general reference character2100.

Integrated circuit device includes regions (710, 720, and 730). As notedearlier, region 710 may be formed with a technology node that is olderand cheaper than region 730. Region 710 may include planar IGFETs andESD structures. However, integrated circuit device 2100 may differ inthat an ESD structure may be formed in region 730 and may include diodes(D2102 and D2104). Diodes (D2102 and D2104) may include a plurality ofhorizontally disposed current carrying regions that can be verticallyaligned above a substrate region 402. The current carrying regions mayinclude a first impurity doped region 2112 and a second impurity dopedregion 2114. Each diode (D2102 and D2104) may include a cathode terminal2116 and an anode terminal 2118. The anode terminal 2118 of diode D2102may be electrically connected to the cathode terminal 2116 of diodeD2104 and may be electrically connected to a pad 2110 which may beelectrically connected to provide or receive an external signal. Thecathode terminal 2116 of diode D2102 may be electrically connected to apad 2120. Pad 2120 may receive an externally provided power supplypotential, such as VDD. The anode terminal 2118 of diode D2104 may beelectrically connected to a pad 2130. Pad 2130 may receive an externallyprovided power supply potential, such as VSS.

The ESD protection circuit structure of FIG. 21 including diodes (D2102and D2104) may correspond to ESD protection circuit structure 1000 ofFIG. 10 and may be used accordingly. Pad 2130 may correspond to terminal1030, pad 2110 may correspond to terminal 1010, and pad 2120 maycorrespond to terminal 1020. Likewise, diode D2102 may correspond todiode D1002 and diode D2104 may correspond to diode D1004.

Diodes (D2102 and D2104) may be formed by forming a layered crystal oftwo materials over dielectric region 422. For example, layers of siliconand silicon germanium may be formed. The silicon layer may form thefirst and second impurity doped regions (2112 and 2114), i.e. thecurrent carrying regions. After a vertical etch, the silicon germaniumlayers may be etched by using a chemical that can selectively etchsilicon germanium with the cathode and anode terminals (2116 and 2118)used as support structures. Next, a dielectric layer 2122 (may be formedusing atomic layer deposition of a dielectric, for example, silicondioxide. The first impurity doped region 2112 may be doped with n-typecarriers, such as phosphorous and/or arsenic, for example. The secondimpurity doped region 2114 may be doped with p-type carriers, such asboron, for example. The doping may be done by implantation with a masklayer over regions other than the desired regions to receive theimpurities. In this way each of the plurality of horizontally disposedcurrent carrying regions may form a p-n junction diode in parallel witheach other.

Diodes (D2102 and D2104) may be formed in conjunction with insulatedgate field effect transistors (IGFETs) having a plurality ofhorizontally disposed channels that can be vertically aligned above asubstrate with each channel being surrounded by a gate structure asdiscussed above.

Referring now to FIG. 22 , a diagram of an integrated circuit deviceaccording to an embodiment is set forth and given the general referencecharacter 2100.

Integrated circuit device 2200 may differ from integrated circuitdevices of previous embodiments in that a region 2210 may be disposedbetween regions (720 and 730), otherwise integrated circuit device 2200may be substantially the same as previous embodiments. Region 2210 maybe a crystalline semiconductor layer. For example, region 2210 may besilicon material. Region 2210 may be silicon, silicon carbide, epitaxialsilicon, as just a few examples. Region 2210 may improve themanufacturability of layers used to form the horizontally disposed andvertically aligned channel regions. Integrated circuit device 2200 mayinclude insulated gate field effect transistors (IGFETs) having aplurality of horizontally disposed channels that can be verticallyaligned above a substrate with each channel being surrounded by a gatestructure formed in region 730 as discussed above, as well as ESDprotection circuit structures formed in regions (710, 720, and 730) asdiscussed in previous embodiments.

Referring now to FIG. 23 , a circuit schematic diagram of an internalcircuit and an ESD protection circuit structure according to anembodiment is set forth and given the general reference character 2300.

Circuit 2300 can include an internal circuit 2310 and an ESD protectioncircuit structure 2320.

Internal circuit 2300 may receive a power supply potential from a pad2302. The power supply potential from pad 2302 may be an externallyapplied power supply potential such as VDD. Internal circuit 2300 mayreceive a power supply potential from a pad 2306. The power supplypotential from pad 2306 may be an externally supplied power supplypotential such as VSS. Internal circuit may receive an input signal froman input terminal 2308 and provide an output signal at a terminal 2314.Internal circuit 2310 may include a p-type IGFET P2312 and an n-typeIGFET N2312. Both p-type IGFET P2312 and n-type IGFET N2312 may eachinclude a plurality of horizontally disposed channels that can bevertically aligned above a substrate with each channel being surroundedby a gate structure.

P-type IGFET P2312 may have a source terminal electrically connected topad 2302. N-type IGFET N2312 may have a source terminal electricallyconnected to pad 2306. P-type IGFET P2312 and N-type IGFET N2312 mayhave gate terminals commonly connected to receive the input signal frominput terminal 2308 and drain terminals commonly connected to providethe output signal at output terminal 2314.

Internal circuit 2310 and may be used as internal circuit 140 and/orinternal circuit 212 of FIGS. 1 and 2 , respectively. ESD protectioncircuit structure 2320 may be used as ESD protection circuit structure160 or any/each or ESD circuit structures (214 and 252) of FIGS. 1 and 2, respectively.

Internal circuit 2310 may not be electrically connected to receive orprovide a signal external to the integrated circuit device.

ESD protection circuit structure 2320 may include two ESD protectioncircuits, a diode D2324 and an ESD protection circuit 2322, eachelectrically connected between pads (2302 and 2306). In this way, ESDprotection circuit structure 2320 may provide protection for an ESDevent at either pad (2302 or 2306), that receive externally providedpower supply potentials. ESD protection circuit 2322 may be a SCR suchas SCR 900 illustrated in FIG. 9 . ESD protection circuit 2322 can beprovided in regions (710 or 810),

Diode D2324 can have a cathode terminal electrically connected to pad2302 and an anode terminal electrically connected to pad 2306. DiodeD2324 can be formed in regions (710 or 810) as a p-n junction or inregion (730 or 830). When diode D2324 is formed in regions (730 or 830),diode D2324 may include a plurality of horizontally current carryingregions that can be vertically aligned above a substrate as illustratedwith respect to diodes (D2104 and D2102) in FIG. 21 .

Referring now to FIG. 24 , an integrated circuit device including acircuit having an ESD protection circuit structure according to anembodiment is set forth in a circuit schematic diagram and given thegeneral reference character 2400. Integrated circuit device 2400 mayhave similar circuit constituents as integrated circuit device 200 ofFIG. 2 and such constituents may have the same reference character.Integrated circuit device 2400 may include a first circuit section 202,a second circuit section 2410, and a third circuit section 2440. Firstcircuit section 202 may include circuits that only have externalconnections to a power supply potential and/or a ground (VSS) potential.Second circuit section 2410 may include circuits that have externalconnections to a power supply potential, a ground potential, and/or apad coupled to receive an external signal, such as a data signal,control signal or a clock signal, as just a few examples. Third circuitsection 2440 may include circuits that have external connections to apower supply potential, a ground potential, and/or a pad coupled toprovide an external signal, such as a data signal, control signal or aclock signal, as just a few examples.

First circuit section 202 may include an internal circuit 212 and an ESDprotection circuit structure 214. Internal circuit 212 and ESD structure214 may each be electrically connected to pad (210 and 216). Internalcircuit 212 may receive an input signal at an input terminal 218 and mayprovide an output signal at an output terminal 220. Pad 210 may receivean external power supply potential, such as VDD and pad 216 may receivean external reference potential such as VSS. In other embodiments,internal circuit 212 may be an internal power supply generator and mayreceive an external power supply potential at pad 210 and may provide aninternal power supply potential to be used by internal circuits. Theinput terminal 218 and the output terminal 220 of internal circuit 212are not electrically connected to any pad that can receive or provide asignal external to the integrated circuit device 200.

Second circuit section 2410 may include pads (2412, 2414, and 2416), anESD protection circuit structure 2422, an input buffer circuit 2420, andESD protection circuit structure 2418. Input buffer circuit 2420 mayreceive an external signal at pad 2416 through ESD protection circuitstructure 2418 and may provide an internal signal at terminal 2424.Input buffer circuit 2420 may be electrically connected to pads (2412and 2414). Pads (2412 and 2414) may respectively receive an externalpower supply potential (such as VDD) and a reference potential (such asVSS). ESD structure 2422 may be electrically connected between pads(2412 and 2414). ESD structure 2418 may be electrically connected topads (2412, 2414, and 2416).

Third circuit section 2440 may include pads (2442, 2444, and 2446), anESD protection circuit structure 2448, an output buffer circuit 2450,and ESD protection circuit structure 2452. Output buffer circuit 2450may receive an internal signal at terminal 2454 and may provide anexternal signal at pad 2446 through ESD protection circuit structure2452. Output buffer circuit 2450 may be electrically connected to pads(2442 and 2444). Pads (2442 and 2444) may respectively receive anexternal power supply potential (such as VDD) and a reference potential(such as VSS). ESD structure 2448 may be electrically connected betweenpads (2442 and 2444). ESD structure 2452 may be electrically connectedto pads (2442, 2444, and 2446).

In one embodiment, internal circuit 212 may include insulated gate fieldeffect transistors (IGFETs) having a plurality of horizontally disposedchannels that can be vertically aligned above a substrate with eachchannel being surrounded by a gate structure. Input buffer circuit 2420may include insulated gate field effect transistors (IGFETs) having aplurality of horizontally disposed channels that can be verticallyaligned above a substrate with each channel being surrounded by a gatestructure. Output buffer circuit 2452 may include insulated gate fieldeffect transistors (IGFETs) having a plurality of horizontally disposedchannels that can be vertically aligned above a substrate with eachchannel being surrounded by a gate structure. Internal circuit 212,input buffer circuit 2420, and output buffer circuit 2450 may includep-type and n-type IGFETs. In one embodiment, ESD protection circuitstructures (214, 2418, 2422, 2448, and 2452) may include electricalcomponents (such as diodes, transistors, and/or resistors) formed with aplurality of horizontally disposed cathodes and anodes that can bevertically aligned above a substrate. In one embodiment, ESD protectioncircuit structures (214, 2418, 2422, 2448, and 2452) may includeelectrical components (such as diodes, transistors, SCRs and/orresistors) formed in the substrate. In one embodiment input buffercircuit 2420 and/or output buffer circuit 2452 may include electricalcomponents (such as IGFETs) formed in the substrate.

When ESD protection circuit structures (214, 2418, 2422, 2448, and 2452)are formed in a semiconductor substrate of integrated circuit device2400, a process having larger critical dimensions (i.e. an older andcheaper process) may be used. The semiconductor substrate may then besent to a state of the art fabrication facility to form the circuitincluding insulated gate field effect transistors (IGFETs) having aplurality of horizontally disposed channels that can be verticallyaligned above a substrate with each channel being surrounded by a gatestructure as will be discussed further in the instant specification.

Integrated circuit device 1300 and integrated circuit devices (1400 and1500) may be incorporated into integrated circuit device 2400. Inputbuffer circuit 1320 and ESD structure 1310 of integrated circuit device1300 may be used as input circuit 2420 and ESD circuit structure 2418 ofintegrated circuit device 2400 of FIG. 24 . Output buffer circuit 1420and ESD structure 1410 of integrated circuit device 1400 may be used asoutput buffer circuit 2450 and ESD circuit structure 2452 of integratedcircuit device 2400 of FIG. 24 . Output buffer circuit 1520 and ESDstructure 1510 of integrated circuit device 1500 may be used as outputbuffer circuit 2450 and ESD circuit structure 2452 of integrated circuitdevice 2400 of FIG. 24 .

Power supply potentials externally provided to pads (210, 2412, and2442) may be different power supply potentials, such as a firstpotential (VDD1) for internal circuit 212, a second potential (VDD2) forinput buffer circuit 2420, and/or a third potential (VDD3) for outputbuffer circuit 2450.

Input buffer 1300 of FIG. 13 and output buffers (1400 and 1500) of FIGS.14 and 15 may be incorporated into integrated circuit devices 2400.

Integrated circuit devices (700, 800, 1600, 1700, 1800, 2100, and 2200)may be contiguous structures, such that, regions may be deposited orbonded in a semiconductor fabrication facility and preferably all formedon a contiguous wafer in a multiple of units and then separated beforepackaged or set in a multi-chip package. For example, regions (710, 720,and 730) may be contiguous regions with virtually no separation otherthan a region border formed by a change of materials. Bonding of regionsmay be performed using wafer to wafer bonding, for example region 710may be formed on a first semiconductor wafer and regions (720 and 730)may be formed on a second semiconductor wafer, then the first and secondwafer may be bonded using a wafer to wafer bonding technique followed bydicing and packaging to form the integrated circuit device.Alternatively, region 710 may be formed on a first semiconductor waferand regions (720 and 730) may be formed on a second semiconductor wafer,then the either the first or second wafer may be diced and a die pickand place may be used to place dies on the first or second intact wafer,followed by dicing and packaging to form the integrated circuit device.

It is understood that the term pad may be any circuit connection that iselectrically connected to provide or receive a signal or a potentialexternally to the integrated circuit device. Such a connection can be aconduit for an ESD event.

Electrically connected can be a connection through a wiring otherpassive component such as a resistor.

A voltage may be expressed as a potential.

A signal can be a data or control signal that can transition betweenlogic levels, as just a few examples. A signal is not a power supplypotential used to provide power to circuitry.

Other electrical apparatus other than semiconductor devices may benefitfrom the invention.

While various particular embodiments set forth herein have beendescribed in detail, the present invention could be subject to variouschanges, substitutions, and alterations without departing from thespirit and scope of the invention. Accordingly, the present invention isintended to be limited only as defined by the appended claims.

What is claimed is:
 1. An integrated circuit device, comprising: aninternal circuit coupled between a first power supply potential and asecond power supply potential, the internal circuit having an inputterminal coupled to receive an input signal and an output terminalcoupled to provide an output signal, the internal circuit including atleast one insulated gate field effect transistor (IGFET) including aplurality of substantially horizontally disposed channels that aresubstantially vertically aligned; and a first electrostatic discharge(ESD) protection circuit structure electrically connected between thefirst power supply potential and the second power supply potentialwherein the internal circuit is not electrically connected to receive asignal generated external to the integrated circuit device and is notelectrically connected to provide a signal external to the integratedcircuit device; a semiconductor substrate providing a first region; asecond region formed over the first region; the at least one insulatedgate field effect transistor (IGFET) is formed in the second region; andthe first ESD protection circuit structure is substantially formedwithin the first region.
 2. The integrated circuit device of claim 1,wherein: the first ESD protection circuit structure includes a diode. 3.The integrated circuit device of claim 2, wherein: the diode includes ananode terminal electrically connected to the first power supplypotential and a cathode region electrically connected to the secondpower supply potential.
 4. The integrated circuit device of claim 1,wherein: the first ESD circuit structure includes a SCR circuit coupledbetween the first power supply potential and the second power supplypotential.
 5. The integrated circuit device of claim 1, wherein: theinternal circuit includes a p-type IGFET including a plurality ofsubstantially horizontally disposed channels that are substantiallyvertically aligned and having a control gate that substantiallysurrounds the substantially horizontally disposed channels; and ann-type IGFET including a plurality of substantially horizontallydisposed channels that are substantially vertically aligned and having acontrol gate that substantially surrounds the substantially horizontallydisposed channels.
 6. The integrated circuit device of claim 5, wherein:the p-type IGFET and n-type IGFET are configured as an inverter circuit.7. The integrated circuit device of claim 1, wherein: the first andsecond power supply potentials are received from external to theintegrated circuit device.
 8. The integrated circuit device of claim 1,further including: an input buffer circuit coupled to receive an inputsignal generated external to the integrated circuit device, the inputsignal received at a first pad.
 9. The integrated circuit device ofclaim 8, further including: a second ESD protection circuit structurehaving a first terminal electrically connected between the first pad andan input terminal of the input buffer circuit.
 10. The integratedcircuit device of claim 9, wherein: the second ESD protection circuitstructure includes a resistor electrically connected between the firstterminal of the second ESD protection circuit structure and the inputterminal of the input buffer circuit.
 11. The integrated circuit deviceof claim 10, wherein: the second ESD protection circuit structurefurther includes a first diode having an anode terminal coupled to thefirst terminal of the second ESD protection circuit structure.
 12. Theintegrated circuit device of claim 11, wherein: the second ESDprotection circuit structure further includes a second diode having acathode terminal coupled to the first terminal of the second ESDprotection circuit structure.
 13. The integrated circuit device of claim11, wherein: the first diode including a plurality of substantiallyhorizontally disposed current carrying regions that are substantiallyvertically aligned.
 14. The integrated circuit device of claim 1,further including: an output buffer circuit coupled to receive an inputsignal and provide an output signal externally to the integrated circuitdevice through a first pad.
 15. The integrated circuit device of claim14, further including: a second ESD protection circuit structure havinga first terminal electrically connected between the first pad and anoutput terminal of the output buffer circuit.
 16. The integrated circuitdevice of claim 15, wherein: the second ESD protection circuit structurefurther includes a first diode having an anode terminal coupled to thefirst terminal of the second ESD protection circuit structure.
 17. Theintegrated circuit device of claim 16, further including: the second ESDprotection circuit structure further includes a second diode having acathode terminal coupled to the first terminal of the second ESDprotection circuit structure.
 18. The integrated circuit device of claim16, wherein: the first diode including a plurality of substantiallyhorizontally disposed current carrying regions that are substantiallyvertically aligned.
 19. An integrated circuit device, comprising: aninternal circuit coupled between a first power supply potential and asecond power supply potential, the internal circuit having an inputterminal coupled to receive an input signal and an output terminalcoupled to provide an output signal, the internal circuit including atleast one insulated gate field effect transistor (IGFET) including aplurality of substantially horizontally disposed channels that aresubstantially vertically aligned; and a first electrostatic discharge(ESD) protection circuit structure electrically connected between thefirst power supply potential and the second power supply potentialwherein the internal circuit is not electrically connected to receive asignal generated external to the integrated circuit device and is notelectrically connected to provide a signal external to the integratedcircuit device wherein the first ESD protection circuit structureincludes a diode, the diode including a plurality of substantiallyhorizontally disposed current carrying regions that are substantiallyvertically aligned and each substantially horizontally disposed currentcarrying region forms a p-n junction diode.